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Journal of Nanotechnology
Volume 2012 (2012), Article ID 561250, 16 pages
http://dx.doi.org/10.1155/2012/561250
Research Article

Nano- and Macrotribological Properties of Nanoperiod Multilayer Films Deposited by Bias Sputtering

1Department of Innovative System Engineering, Nippon Institute of Technology, Saitama 345-8501, Japan
2Department of Research and Development, OSG Corporation, Aichi 442-8544, Japan

Received 8 December 2011; Accepted 21 February 2012

Academic Editor: Arturo I. Martinez

Copyright © 2012 Shojiro Miyake and Mei Wang. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Linked References

  1. X. Chu, M. Wong, S. Sproul, W. D. Rhode, and S. A. Barnett, “Deposition and properties of polycrystalline TiN/NbN superlattice coatings,” Journal of Vacuum Science & Technology A, vol. 10, no. 1604, 6 pages, 1992. View at Google Scholar
  2. L. A. Donohue, J. Cawley, D. B. Lewis, J. S. Brooks, and W. D. Munz, “Investigation of superlattice coatings deposited by a combined steered arc evaporation and unbalanced magnetron sputtering technique,” Surface and Coatings Technology, vol. 76-77, no. 1, pp. 149–158, 1995. View at Publisher · View at Google Scholar · View at Scopus
  3. X. Chu and S. A. Barnett, “Model of superlattice yield stress and hardness enhancements,” Journal of Applied Physics, vol. 77, no. 9, pp. 4403–4411, 1995. View at Publisher · View at Google Scholar · View at Scopus
  4. S. Miyake, “Improvement of mechanical properties of nanometer period multilayer films at interfaces of each layer,” Journal of Vacuum Science and Technology B, vol. 21, no. 2, pp. 785–789, 2003. View at Google Scholar · View at Scopus
  5. D. Li, X. Chu, S. C. Cheng et al., “Synthesis of superhard carbon nitride composite coatings,” Applied Physics Letters, vol. 67, p. 203, 1995. View at Publisher · View at Google Scholar · View at Scopus
  6. A. Nakayama, “A mystery of superlattice thin film hardness,” Japan Society Mechanical Engineering, vol. 100, no. 943, pp. 593–595, 1997 (Japanese). View at Google Scholar
  7. S. Miyake, R. Kaneko, Y. Kikuya, and I. Sugimoto, “Micro­tribological studies on fluorinated carbon film,” Transactions of the American Society of Mechanical Engineers, Journal of Tribology, no. 113, pp. 384–389, 1991. View at Google Scholar
  8. S. Miyake, T. Miyamoto, R. Kaneko, and T. Miyazaki, “Macro­ and micro­tribological properties of polished CVD diamond films and trial laser­processing of diamond,” The Institute of Electronics, Information and Communication Engineers, on Electronics, vol. E78 C, no. 2, pp. 180–185, 1995. View at Google Scholar
  9. S. Miyake, R. Kaneko, and T. Miyamoto, “Micro wear Increasing of polished chemically vapour deposited diamond film by nitrogen ion implantation by atomic force microscope,” Nuclear Instruments and Methods in Physics Research Section B, vol. 108, pp. 70–74, 1996. View at Google Scholar
  10. S. Miyake, S. Watanabe, H. Miyazawa, M. Murakawa, R. Kaneko, and T. Miyamoto, “Micro scratch hardness increasing of ion plated carbon film by nitrogen inclusion evaluated by atomic force microscope,” Applied Physics Letters, vol. 65, no. 25, pp. 3206–3208, 1994. View at Google Scholar
  11. S. Miyake, S. Watanabe, M. Murakawa, R. Kaneko, and T. Miyato, “Tribological study of cubic boron nitride film,” Thin Solid Films, vol. 212, no. 1-2, pp. 262–266, 1992. View at Google Scholar · View at Scopus
  12. S. Miyake and K. Matsuzaki, “Mechanical nanoprocessing of layered crystal structure materials by atomic force microscopy,” Japanese Journal of Applied Physics, vol. 41, no. 9, pp. 5706–5712, 2002. View at Google Scholar · View at Scopus
  13. S. Miyake, Y. Sekine, and S. Watanabe, “Deposition and tribology of carbon and boron nitride super lattice solid lubricant films,” The Japan Society of Mechanical Engineers International Journal C, vol. 47, pp. 377–383, 2004. View at Google Scholar
  14. S. Miyake, “Tribology of carbon nitride and boron nitride nanoperiod multilayer films and its application to nanoscale processing,” Thin Solid Films, vol. 493, no. 1-2, pp. 160–169, 2005. View at Publisher · View at Google Scholar · View at Scopus
  15. H. J. Mamin, L. S. Fan, S. Hoen, and D. Rugar, “Tip-based data storage using micromechanical cantilevers,” Sensors and Actuators, vol. 48, no. 3, pp. 215–219, 1995. View at Google Scholar · View at Scopus
  16. H. J. Mamin and D. Rugar, “Thermomechanical data storage using a fiber optic stylus,” Applied Physics Letters, vol. 61, no. 24, p. 1003, 1992. View at Google Scholar
  17. G. Binnig, M. Despont, U. Drechsler et al., “Ultrahigh-density atomic force microscopy data storage with erase capability,” Applied Physics Letters, vol. 74, no. 9, pp. 1329–1331, 1999. View at Google Scholar · View at Scopus
  18. S. Miyake and J. Kim, “Nanoprocessing of carbon and boron nitride nanoperiod multilayer films,” Japanese Journal of Applied Physics, vol. 42, no. 3 B, pp. L322–L325, 2003. View at Google Scholar · View at Scopus
  19. L. Zhang, T. Sakai, N. Sakuma, T. Ono, and K. Nakayama, “Nanostructural conductivity and surface-potential study of low-field-emission carbon films with conductive scanning probe microscopy,” Applied Physics Letters, vol. 75, no. 22, pp. 3527–3529, 1999. View at Google Scholar · View at Scopus
  20. M. Nonnenmacher, M. P. O'Boyle, and H. K. Wickramasinghe, “Kelvin probe force microscopy,” Applied Physics Letters, vol. 58, no. 25, pp. 2921–2923, 1991. View at Publisher · View at Google Scholar · View at Scopus
  21. A. Kumagai, K. Harada, K. Ozawa, and O. Ishiwata, “Evaluation of tribological properties of a longitudinal magnetic recording medium using lateral modulation friction force microscope,” Japanese Journal of Applied Physics, vol. 35, no. 12 A, pp. 6286–6291, 1996. View at Google Scholar · View at Scopus
  22. S. Miyake, Y. Takahashi, M. Wang, T. Saitoh, and S. Matsunuma, “Lubricant supply from crystal boundaries of perpendicular magnetic disk evaluated by lateral modulation friction force microscopy,” Japanese Journal of Applied Physics, vol. 43, no. 11 B, pp. L1469–L1471, 2004. View at Publisher · View at Google Scholar · View at Scopus
  23. S. Miyake and M. Wang, “Mechanical properties of extremely thin B-C-N protective layer deposited with helium addition,” Japanese Journal of Applied Physics, vol. 43, no. 6 A, pp. 3566–3571, 2004. View at Google Scholar · View at Scopus
  24. M. F. Doerner and W. D. Nix, “A method of interpreting the data from depth-sensing indentation instruments,” Journal of Materials Research, vol. 14, pp. 601–609, 1986. View at Google Scholar
  25. Z. N. Farhat, Y. Ding, D. O. Northwood, and A. T. Alpas, “Nanoindentation and friction studies on Ti-based nanolaminated films,” Surface and Coatings Technology, vol. 89, no. 1-2, pp. 24–30, 1997. View at Google Scholar · View at Scopus
  26. K. Yamanaka and E. Tomita, “Lateral force modulation atomic force microscope for selective imaging of friction forces,” Japanese Journal of Applied Physics, vol. 34, no. 5 B, pp. 2879–2882, 1995. View at Google Scholar · View at Scopus
  27. S. Miyake, M. Wang, T. Saitoh, and S. Watanabe, “Microtribological properties of B-C-N extremely thin protective films deposited on plasma pretreated magnetic layers,” Surface and Coatings Technology, vol. 195, no. 2-3, pp. 214–226, 2005. View at Publisher · View at Google Scholar · View at Scopus
  28. J. Colchero, M. Luna, and A. M. Baró, “Lock-in technique for measuring friction on a nanometer scale,” Applied Physics Letters, vol. 68, no. 20, pp. 2896–2898, 1996. View at Publisher · View at Google Scholar · View at Scopus
  29. O. Pfeiffer, R. Bennewitz, A. Baratoff, E. Meyer, and P. Grütter, “Lateral-force measurements in dynamic force microscopy,” Physical Review B, vol. 65, no. 16, Article ID 161403, pp. 1614031–1614034, 2002. View at Google Scholar · View at Scopus
  30. S. Miyake, Y. Wakatsuki, M. Wang, and S. Matsunuma, “Amplitude dependence of the lateral-vibration wear test for perpendicular recording magnetic disks treated by heat curing,” Japanese Journal of Applied Physics, vol. 44, no. 5 A, pp. 3209–3217, 2005. View at Publisher · View at Google Scholar · View at Scopus
  31. S. Miyake, T. Hashizume, and Y. Wakatsuki, “Nanoprocessing and evaluation of carbon and boron nitride nanoperiod multilayer films by lateral force modulation method,” Surface and Interface Analysis, vol. 38, no. 4, pp. 873–878, 2006. View at Publisher · View at Google Scholar · View at Scopus
  32. S. Miyake, Y. Takahashi, M. Wang, and T. Saito, “Durability evaluation of perfluoropolyether-lubricant-coated protective diamond-like carbon film by the lateral vibration friction test,” Journal of Physics D, vol. 38, no. 13, pp. 2244–2252, 2005. View at Publisher · View at Google Scholar · View at Scopus
  33. S. Miyake, M. Wang, and J. Kim, “Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films,” Nanotechnology, vol. 17, pp. 1607–1614, 2006. View at Google Scholar