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Journal of Nanotechnology
Volume 2012, Article ID 635705, 6 pages
Research Article

A Combined Ion Implantation/Nanosecond Laser Irradiation Approach towards Si Nanostructures Doping

1Dipartimento di Fisica e Astronomia, Università di Catania, via S. Sofia 64, 95123 Catania, Italy
2MATIS, CNR, IMM, via S. Sofia 64, 95123 Catania, Italy
3Istituto per la Microelettronica e Microsistemi (CNR)-(IMM)—Consiglio Nazionale delle Ricerche VIII Strada 5, 95121 Catania, Italy
4Dipartimento di Fisica “A.Volta,” Università degli Studi di Pavia, via Bassi 6, 27100 Pavia, Italy

Received 28 September 2011; Accepted 23 November 2011

Academic Editor: Arturo I. Martinez

Copyright © 2012 F. Ruffino et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Citations to this Article [4 citations]

The following is the list of published articles that have cited the current article.

  • Michele Perego, Gabriele Seguini, Elisa Arduca, Jacopo Frascaroli, Davide De Salvador, Massimo Mastromatteo, Alberto Carnera, Giuseppe Nicotra, Mario Scuderi, Corrado Spinella, Giuliana Impellizzeri, Cristina Lenardi, and Enrico Napolitani, “Thermodynamic stability of high phosphorus concentration in silicon nanostructures,” Nanoscale, vol. 7, no. 34, pp. 14469–14475, 2015. View at Publisher · View at Google Scholar
  • Elisa Arduca, and Michele Perego, “Doping of silicon nanocrystals,” Materials Science in Semiconductor Processing, 2016. View at Publisher · View at Google Scholar
  • E. Arduca, G. Seguini, C. Martella, A. Lamperti, E. Napolitani, D. De Salvador, G. Nicotra, M. Scuderi, C. Spinella, and M. Perego, “ Electronic band structures of undoped and P-doped Si nanocrystals embedded in SiO 2 ,” Journal of Materials Chemistry C, 2018. View at Publisher · View at Google Scholar
  • Sergei S. Bubenov, Sergey G. Dorofeev, Andrei A. Eliseev, Nikolay N. Kononov, Alexey V. Garshev, Natalia E. Mordvinova, and Oleg I. Lebedev, “ Diffusion doping route to plasmonic Si/SiO x nanoparticles ,” RSC Advances, vol. 8, no. 34, pp. 18896–18903, 2018. View at Publisher · View at Google Scholar