Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

<table class="table-group" width="800px"><tr class="fig-image" id="a"><td><img alt="102404.fig.007a" src="https://static.hindawi.com/articles/jnt/volume-2014/102404/figures/102404.fig.007a.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(a) </b>Diamond radius: 50 nm; load: 50 <i>μ</i>N</td></tr></table></td></tr><tr class="fig-image" id="b"><td><img alt="102404.fig.007b" src="https://static.hindawi.com/articles/jnt/volume-2014/102404/figures/102404.fig.007b.jpg"/></td></tr><tr class="fig-caption"><td align="center"><table><tr><td><b>(b) </b>Diamond radius: 200 nm; load: 50 <i>μ</i>N</td></tr></table></td></tr></table>

<table>Shear stress of the silicon-diamond contact area at 50 <i>μ</i>N load for tip radii of (a) 50 and (b) 200 nm.</table>

Journal of Nanotechnology

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Figure 7

Figure 7: Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing 