Review Article
Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing
Table 1
Processing conditions.
| Process | Load (nN) | Voltage (V) |
| Mechanical processing | 40, 80, 120 | ⋯ | Electrical processing | ⋯ | 1, 2, 3 | Mechanical + electrical processing | 40 | 1 | 80 | 2 | 120 | 3 |
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