Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing

Table 2

Breakdown voltages and processing conditions.

Processing	Tracks
	A1	B1	C1	A2	B2	C2	A3	B3	C3
Load (nN)	40	⋯	40	80	⋯	80	120	⋯	120
Voltage (V)	⋯	1	1	⋯	2	2	⋯	3	3
Breakdown voltage (V)	1.1	1.1	1.08	1.2	3 or over	3 or over	3 or over	3 or over	3 or over