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Journal of Nanotechnology
Volume 2014 (2014), Article ID 170415, 26 pages
Review Article

Direct-Write Ion Beam Lithography

1Independent, Richardson, TX 75081, USA
2Raith GmbH, Konrad-Adenauer-Allee 8, Phoenix West, 44263 Dortmund, Germany

Received 23 July 2013; Revised 22 October 2013; Accepted 27 October 2013; Published 10 February 2014

Academic Editor: Paresh Chandra Ray

Copyright © 2014 Alexandra Joshi-Imre and Sven Bauerdick. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

How to Cite this Article

Alexandra Joshi-Imre and Sven Bauerdick, “Direct-Write Ion Beam Lithography,” Journal of Nanotechnology, vol. 2014, Article ID 170415, 26 pages, 2014. doi:10.1155/2014/170415