Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy

Figure 2

2D and 3D AFM image samples with different deposition time, (a) 5 min, (b) 20 min, (c) 35 min, (d) 65 min, and (e) 85 min.

(a)

(b)

(c)

(d)

(e)