Deposition and Characterization of Molybdenum Thin Film Using Direct Current Magnetron and Atomic Force Microscopy

Table 3

Roughness parameter of Mo thin film according to different deposition time.

Unit	nm
Deposition time (min)
5	1.33	1.69	1.27	0.22	3.7
20	2.58	3.23	1.25	0.35	2.97
35	2.44	3.06	1.25	0.33	3.04
65	1.57	1.99	1.26	0.21	4.7
85	1.17	1.46	1.25	0.22	2.9