| Zernike coefficients (μm) | | | ϕ=3 mm | ϕ=4 mm | ϕ=4.7 mm | Aberration name | C (n, m) | MW | MP | SYM | MW | MP | SYM | MW | MP | SYM |
| Vert trefoil | C (3, −3) | −0.05 ± 0.07 | 0.200 ± 006 | −0.04 ± 0.02 | 0.02 ± 0.02 | 0.41 ± 0.01 | −0.03 ± 0.04 | 0.06 ± 0.02 | 0.41 ± 0.02 | 0.06 ± 0.03 | Vert coma | C (3, −1) | 0.05 ± 0.01 | 0.22 ± 0.02 | −0.05 ± 0.01 | 0.05 ± 0.02 | 0.40 ± 0.01 | 0.05 ± 0.01 | 0.083 ± 0.001 | 0.27 ± 0.02 | 0.03 ± 0.04 | Horiz coma | C (3, 1) | −0.030 ± 0.006 | −0.010 ± 0.006 | 0.037 ± 0.005 | 0.01 ± 0.01 | −0.007 ± 0.001 | 0.00 ± 0.08 | 0.01 ± 0.01 | −0.31 ± 0.03 | −0.04 ± 0.02 | Horiz trefoil | C (3, 3) | 0.040 ± 0.001 | 0.045 ± 0.003 | −0.01 ± 0.04 | 0.04 ± 0.02 | 0.080 ± 0.007 | 0.00 ± 0.03 | 0.011 ± 0.003 | 0.17 ± 0.06 | 0.20 ± 0.05 | Vert tetrafoil | C (4, −4) | −0.004 ± 0.004 | −0.044 ± 0.007 | −0.01 ± 0.03 | 0.00 ± 0.01 | −0.01 ± 0.02 | 0.01 ± 0.02 | 0.038 ± 0.004 | 0.20 ± 0.03 | 0.04 ± 0.03 | Sec vert astigmatism | C (4, −2) | 0.006 ± 0.001 | 0.011 ± 0.006 | 0.02 ± 0.01 | 0.002 ± 0.001 | −0.02 ± 0.01 | 0.01 ± 0.02 | 0.003 ± 0.003 | −0.37 ± 0.02 | 0.03 ± 0.04 | Spherical aberration | C (4, 0) | −0.13 ± 0.01 | 0.018 ± 0.008 | −0.006 ± 0.004 | −0.12 ± 0.01 | 0.022 ± 0.009 | −0.120 ± 0.006 | −0.105 ± 0.005 | −0.29 ± 0.02 | −0.20 ± 0.02 | Sec horiz astigmatism | C (4, 2) | 0.02 ± 0.02 | 0.008 ± 0.001 | −0.002 ± 0.009 | 0.03 ± 0.01 | −0.007 ± 0.003 | 0.01 ± 0.03 | 0.006 ± 0.003 | −0.09 ± 0.04 | 0.11 ± 0.05 | Horiz tetrafoil | C (4, 4) | 0.01 ± 0.02 | −0.01 ± 0.01 | 0.04 ± 0.02 | 0.01 ± 0.02 | −0.002 ± 0.006 | 0.055 ± 0.005 | −0.013 ± 0.005 | 0.22 ± 0.03 | 0.15 ± 0.02 | Vert pentafoil | C (5, −5) | 0.04 ± 0.03 | 0.073 ± 0.008 | 0.02 ± 0.04 | 0.01 ± 0.02 | 0.178 ± 0.008 | 0.01 ± 0.05 | 0.012 ± 0.008 | 0.21 ± 0.05 | 0.07 ± 0.07 | Sec vert trefoil | C (5, −3) | −0.02 ± 0.04 | −0.019 ± 0.006 | −0.03 ± 0.01 | −0.02 ± 0.02 | −0.024 ± 0.008 | −0.04 ± 0.03 | 0.01 ± 0.01 | −0.23 ± 0.02 | 0.00 ± 0.01 | Sec vert coma | C (5, −1) | −0.01 ± 0.05 | −0.021 ± 0.007 | 0.017 ± 0.005 | −0.009 ± 0.006 | −0.045 ± 0.005 | 0.04 ± 0.05 | 0.013 ± 0.004 | −0.23 ± 0.01 | 0.1 ± 0.1 | Horiz sec coma | C (5, 1) | 0.121 ± 0.001 | −0.007 ± 0.005 | −0.025 ± 0.007 | 0.078 ± 0.008 | −0.005 ± 0.005 | 0.017 ± 0.007 | 0.049 ± 0.008 | −0.252 ± 0.006 | 0.09 ± 0.03 | Horiz sec trefoil | C (5, 3) | 0.029 ± 0.007 | 0.001 ± 0.005 | 0.00 ± 0.01 | 0.07 ± 0.02 | −0.012 ± 0.004 | 0.01 ± 0.01 | −0.004 ± 0.005 | 0.01 ± 0.01 | 0.07 ± 0.08 | Horiz pentafoil | C (5, 5) | 0.0059 ± 0.006 | 0.03 ± 0.01 | 0.00 ± 0.02 | 0.05 ± 0.03 | 0.031 ± 0.008 | −0.02 ± 0.04 | 0.00 ± 0.01 | 0.04 ± 0.02 | 0.1 ± 0.1 | Vert hexafoil | C (6, −6) | 0.01 ± 0.03 | −0.024 ± 0.004 | −0.03 ± 0.03 | −0.01 ± 0.02 | −0.019 ± 0.005 | 0.00 ± 0.02 | 0.01 ± 0.01 | 0.036 ± 0.007 | 0.07 ± 0.09 | Sec vert tetrafoil | C (6, −4) | 0.016 ± 0.007 | 0.005 ± 0.003 | 0.01 ± 0.02 | 0.01 ± 0.02 | −0.003 ± 0.005 | 0.00 ± 0.04 | −0.007 ± 0.005 | −0.091 ± 0.006 | −0.01 ± 0.04 | Tert vert astigmatism | C (6, −2) | 0.009 ± 0.002 | −0.008 ± 0.002 | 0.02 ± 0.009 | −0.026 ± 0.009 | 0.011 ± 0.002 | 0.026 ± 0.008 | 0.014 ± 0.008 | −0.11 ± 0.01 | 0.06 ± 0.08 | Sec spherical aberration | C (6, 0) | 0.12 ± 0.02 | 0.013 ± 0.004 | 0.01 ± 0.01 | 0.08 ± 0.02 | −0.001 ± 0.005 | 0.02 ± 0.05 | 0.079 ± 0.003 | −0.14 ± 0.02 | 0.03 ± 0.03 | Tert horiz astigmatism | C (6, 2) | 0.06 ± 0.03 | 0.006 ± 0.003 | 0.01 ± 0.02 | 0.038 ± 0.006 | 0.002 ± 0.001 | −0.03 ± 0.02 | 0.008 ± 0.003 | 0.00 ± 0.03 | 0.04 ± 0.05 | Horiz sec tetrafoil | C (6, 4) | 0.01 ± 0.05 | 0.009 ± 0.002 | 0.018 ± 0.009 | 0.05 ± 0.02 | 0.005 ± 0.002 | 0.00 ± 0.02 | 0.008 ± 0.001 | −0.06 ± 0.03 | 0.07 ± 0.02 | Horiz hexafoil | C (6, 6) | 0.03 ± 0.04 | −0.004 ± 0.005 | 0.01 ± 0.02 | 0.01 ± 0.05 | 0.001 ± 0.006 | −0.008 ± 0.005 | −0.003 ± 0.004 | 0.11 ± 0.05 | −0.02 ± 0.08 |
| Overall HOAs | RMS | 0.25 ± 0.06 | 0.32 ± 0.02 | 0.11 ± 0.06 | 0.21 ± 0.05 | 0.61 ± 0.02 | 0.16 ± 0.06 | 0.18 ± 0.02 | 1.0 ± 0.1 | 0.4 ± 0.2 |
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