Research Article

Titanium Dioxide-Based YX Surface Acoustic Wave Hydrogen Gas Sensors

Table 1

Values of thickness, refractive index, and porosity of Ti and Ti -Au films measured by ellipsometry.

SamplesFilm thicknessRefractive indexPorosity
(nm)at 589 nm(%)

Ti at 300°C482.0937
Ti -Au at 300°C482.1433