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Journal of Sensors
Volume 2008, Article ID 782764, 7 pages
http://dx.doi.org/10.1155/2008/782764
Research Article

Micro-Optoelectromechanical Tilt Sensor

1Holistic Electronics Research Lab, ECE Department, University of Cyprus, 1678 Nicosia, Cyprus
2Institute of Biomedical Engineering, Imperial College London, London SW7 2AZ, UK

Received 19 February 2008; Accepted 19 April 2008

Academic Editor: Ignacio Matias

Copyright © 2008 Timothy G. Constandinou and Julius Georgiou. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

This paper presents a novel hybrid CMOS/MEMS tilt sensor with a resolution over a range. The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface. A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass. The complete sensor occupies an area of under 2.5 mm 2.5 mm.