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Journal of Sensors
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2008
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Article
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Fig 1
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Research Article
Micro-Optoelectromechanical Tilt Sensor
Figure 1
The micro-optoelectromechanical tilt sensor concept, based on a two-tier stack comprising of MEMS structure on top of CMOS die. The optical detector has 66 photodetector elements arranged in 5
°
segments to cover a 330
°
field-of-view (FOV).