Micro-Optoelectromechanical Tilt Sensor

Figure 7

Microphotograph of the tilt sensor electronics implemented in AMS 0.35 μm 2P4M CMOS technology. The dimensions are: 1250 μm × 1250 μm (for core), and 2.5 mm × 2.5 mm die dimensions, that is, including padring and bondpads (not shown).