Micro-Optoelectromechanical Tilt Sensor

Table 1

Target design specifications.

CMOS technology	AMS 0.35 μm 2P4M CMOS
MEMS technology	Tronics SOI/HARM
Supply voltage	3.3 V
Circuit size	2500 μm × 2500 μm
Device count	4312
Input light intensity (range)	10 nW/mm^2 to 100 μW/mm^2
Input system clock (range)	100 Hz to 1 MHz
Input current bias (range)	1 nA to 50 nA
Tilt angle range	330^° (±165^°)
Tilt resolution	5^°
Effective dynamic range	36 dB (6 bits)
System power consumption	^†10–35 μW

^†Excluding light emitter consumption.