Research Article
Micro-Optoelectromechanical Tilt Sensor
Table 1
Target design specifications.
| CMOS technology | AMS 0.35 μm 2P4M CMOS | MEMS technology | Tronics SOI/HARM | Supply voltage | 3.3 V | Circuit size | 2500 μm × 2500 μm | Device count | 4312 | Input light intensity (range) | 10 nW/mm2 to 100 μW/mm2 | Input system clock (range) | 100 Hz to 1 MHz | Input current bias (range) | 1 nA to 50 nA | Tilt angle range | 330° (±165°) | Tilt resolution | 5° | Effective dynamic range | 36 dB (6 bits) | System power consumption | †10–35 μW |
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†Excluding light emitter consumption.
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