Journal of Sensors / 2009 / Article / Fig 10

Research Article

Design and Fabrication of Slotted Multimode Interference Devices for Chemical and Biological Sensing

Figure 10

Fabrication process of slotted MMI sensor.
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(a) Growth SiON layer by PECVD.
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(b) Deposition of chromium layer by PVD.
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(c) Photolithography.
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(d) Develop photoresist.
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(e) Chromium RIE.
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(f) SiON layer RIE.
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(g) Wet chromium etch.

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