A Review of Carbon Nanotubes-Based Gas Sensors

Figure 16

(a) SEM image of the as-grown structure of CNTs on Si/Si₃N₄; (b) schematic diagram of CNTs linking pre-patterned platinum contacts in resistor geometry; (c) dynamic gas responses of CNTs thin film at different operating temperatures in dry air and 100 ppb of NO₂ [52].

(a)

(b)

(c)