Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection
Figure 3
SEM images of the fabricated microcantilevers with the dimensions denoted. For the cantilevers from “a” to “d,” their resonance modes are the 1st flexure-mode, the 2nd flexure-mode, the 1st torsion-mode, and the 2nd torsion-mode, respectively.
