Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection

Figure 5

Measured amplitude-frequency responses for the 1st and 2nd flexural mode (no. 1 and 2), as well as, the 1st and 2nd torsion modes (no. 3 and 4) of cantilever sensors in the open-loop circuit (on the left side) and the closed-loop circuit (on the right side).