Integrated MEMS/NEMS Resonant Cantilevers for Ultrasensitive Biological Detection
Figure 7
From bottom to top, the biotin-avidin specific hybridization induced frequency shifts are tested for the no. 1 cantilever in the 1st flexural mode, the no. 2 cantilever in the 2nd flexural mode, the no. 3 cantilever in the 1st torsional mode, and the no. 4 cantilever in the 2nd torsional mode, respectively.
