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Journal of Sensors
Volume 2009 (2009), Article ID 727893, 5 pages
Research Article

Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates

1Physics Department, University of Crete, 71003 Heraklion, Crete, Greece
2IESL, Foundation for Research and Technology Hellas (FORTH), 71003 Heraklion, Crete, Greece

Received 26 December 2008; Revised 16 March 2009; Accepted 1 May 2009

Academic Editor: Wojtek Wlodarski

Copyright © 2009 G. Kiriakidis et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


thin films with a thickness of the order of 100 nm were grown by dc magnetron sputtering on glass, Si and flexible (PET) substrates. The electrical conductivity of thin films exhibited a change of two orders of magnitude during photoreduction with ultraviolet light and subsequent oxidation in ozone concentrations from 2370 to 15 ppb, at room temperature. Optical transparency of over 85% for all substrates was maintained. Film structural and ozone sensing properties were analyzed. Surface morphology investigations carried out by SEM for films on PET substrates showed extended surface cracking for bending angles beyond . Optimization of growth conditions has led to films with extremely low detection levels for ozone down to 15 ppb at room temperature, demonstrating the wide prospective of utilizing these metal oxides as gas sensors on flexible substrates for a variety of automotive and air-conditioning applications.