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Journal of Sensors
Volume 2009, Article ID 790476, 9 pages
http://dx.doi.org/10.1155/2009/790476
Research Article

Schottky Junction Methane Sensors Using Electrochemically Grown Nanocrystalline-Nanoporous ZnO Thin Films

1Department of Electronics & Telecommunication Engineering, IC. Design & Fabrication Centre, Jadavpur University, Kolkata 700032, India
2Department of Physics, Chemistry and Biology, Linkoping University, SE-581 83 Linköping, Sweden

Received 29 December 2008; Accepted 1 July 2009

Academic Editor: Giorgio Sberveglieri

Copyright © 2009 P. K. Basu et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

Nanocrystalline-nanoporous ZnO thin films were prepared by an electrochemical anodization method, and the films were tested as methane sensors. It was found that Pd-Ag catalytic contacts showed better sensing performance compared to other noble metal contacts like Pt and Rh. The methane sensing temperature could be reduced to as low as 1 0 0 C by sensitizing nanocrystalline ZnO thin films with Pd, deposited by chemical method. The sensing mechanism has been discussed briefly.