Vertical MEMS Resonators for Real-Time Clock Applications

Table 1

Thelma technology parameters.

	Structural layer	1st oxide	Buried poly silicon	2nd oxide	Substrate
Thickness, 𝜇m	15	1.6	0.45	2.5	—
Resistance	10 Ω/square	—	25 Ω/square	—	1 Ω/cm