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Journal of Sensors
Volume 2010, Article ID 409687, 8 pages
http://dx.doi.org/10.1155/2010/409687
Research Article

Silicon-Micromachined Gas Chromatographic Columns for the Development of Portable Detection Device

Laboratoire de Chimie Physique et Rayonnements Alain Chambaudet, UMR CEA E4, UFR Sciences et Techniques, 16 route de Gray, 25000 Besancon, France

Received 2 September 2010; Accepted 5 October 2010

Academic Editor: K. Kalantar-Zadeh

Copyright © 2010 Jean-Baptiste Sanchez et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

We report the fabrication of a gas chromatographic column module integrated on a silicon substrate and usable as a portable measurement device dedicated to the selective detection of various chemical compounds (gas or vapour). PDMS, PEG, and F13-TEOS stationary phases have been prepared in order to coat the inside walls of microchannels. The microcolumn tests were performed with a mixture of hydrocarbons and ketone. After having evaluated the effectiveness of such a separation module, we showed an application by coupling a GC microcolumn with a metal oxide-based gas sensor. The best results were obtained at a low isothermal temperature mode of the GC micro-column (near the ambient temperature). The coupling between the GC microcolumn and a metal oxide gas sensor enables to obtain a rapid, reliable, and selective analysis of various chemical compounds.