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Journal of Sensors
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2010
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Article
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Fig 2
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Research Article
Ta
2
O
5
Thin Films for Capacitive RF MEMS Switches
Figure 2
Typical capacitance transient during the application of a constant electric field
𝐸
=
0
.
9
MV/cm. The solid line is the fit to the capacitance data with the (
2
).