Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches

<table>Insertion (<svg height="12.9875" id="M32" style="vertical-align:-2.81255pt" version="1.1" viewbox="0 0 19.6625 12.9875" width="19.6625" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,12.9875)">
<g transform="translate(72,-61.61)">
<text transform="matrix(1,0,0,-1,-71.95,64.46)">
<tspan style="font-size: 11.21px; " x="0" y="0">𝑆</tspan>
</text>
<text transform="matrix(1,0,0,-1,-64.66,61.66)">
<tspan style="font-size: 7.85px; " x="0" y="0">2</tspan>
<tspan style="font-size: 7.85px; " x="3.9230001" y="0">1</tspan>
</text>
</g>
</g>
</svg>) and return (<svg height="12.9875" id="M33" style="vertical-align:-2.81255pt" version="1.1" viewbox="0 0 19.6625 12.9875" width="19.6625" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,12.9875)">
<g transform="translate(72,-61.61)">
<text transform="matrix(1,0,0,-1,-71.95,64.46)">
<tspan style="font-size: 11.21px; " x="0" y="0">𝑆</tspan>
</text>
<text transform="matrix(1,0,0,-1,-64.66,61.66)">
<tspan style="font-size: 7.85px; " x="0" y="0">1</tspan>
<tspan style="font-size: 7.85px; " x="3.9230001" y="0">1</tspan>
</text>
</g>
</g>
</svg>) losses for a shunt capacitive switch in the up state.</table>

Journal of Sensors

fig5

Figure 5

Figure 5: Ta<sub>2</sub>O<sub>5</sub> Thin Films for Capacitive RF MEMS Switches 

Journal of Sensors

Ta2O5 Thin Films for Capacitive RF MEMS Switches

Figure 5

Ta₂O₅ Thin Films for Capacitive RF MEMS Switches