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Journal of Sensors
Volume 2010, Article ID 706829, 7 pages
http://dx.doi.org/10.1155/2010/706829
Research Article

A Fourier Ellipsometer Using Rotating Polarizer and Analyzer at a Speed Ratio 1 : 1

Physics Department, Islamic University of Gaza, P.O. Box 108, Gaza, Palestine

Received 6 September 2010; Accepted 26 November 2010

Academic Editor: S. C. Mukhopadhyay

Copyright © 2010 Taher M. El-Agez and Sofyan A. Taya. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

We propose theoretically a spectroscopic ellipsometer in which the polarizer and the analyzer are rotating synchronously in the same direction with the same angular speed. The light intensity received by the detector contains four components, one dc and three AC terms, with frequencies of 2 𝜔 , 4 𝜔 , and 6 𝜔 . The main advantage of the proposed ellipsometer is that one can extract the ellipsometric parameters 𝜓 and Δ from the AC Fourier coefficients without relying on the dc component which is considered to be a serious problem in rotating-analyzer or -polarizer ellipsometers. This allows measurements in a semidark room without worrying about stray light problems, dark currents in detectors, and long-term fluctuations in light sources. The results from the simulated spectra of the complex refractive index of c-Si and Au are presented. The noise effect on the proposed ellipsometer was simulated and plotted for the two samples.