A Fourier Ellipsometer Using Rotating Polarizer and Analyzer at a Speed Ratio 1 : 1

Figure 6

Percent error in 𝜓, Δ, 𝑛, and 𝑘, for Si sample at 𝜆=632.8 nm and 𝜃₀=70^∘, as a function of the error in (1) 𝜃, (2) 𝜏, and (3) 𝛿 successively varied from −0.2^∘ to 0.2^∘ in steps of 0.02^∘ while keeping the two other variables equal to zero.

(a)

(b)

(c)

(d)