Model Design of Piezoelectric Micromachined Modal Gyroscope

Table 3

Relation between the quantitative indicators and the optimizing variables.

Variable	Value (mm)	𝐴𝑥	𝐴𝑦	𝐴𝑍	𝐴(𝐸𝑌/𝐸𝑋)	𝐵(𝐸𝑌/𝐸𝑍)
𝑑 (𝑊=0.75 mm, 𝐿=1 mm)	0.5	6.8325𝑒−015	3.8273𝑒−015	1.3724𝑒−014	0.5602	0.2789
	1	6.7979𝑒−015	4.0901𝑒−015	1.3562𝑒−014	0.6017	0.3016
	1.5	6.1609𝑒−015	4.1988𝑒−015	1.2567𝑒−014	0.6815	0.3341
𝑊 (𝑑=0.5 mm, 𝐿=1 mm)	0.45	3.1305𝑒−015	1.9173𝑒−015	6.4646𝑒−015	0.6125	0.2966
	0.75	6.8325𝑒−015	3.8273𝑒−015	1.3724𝑒−014	0.5602	0.2789
	1.05	7.3949𝑒−015	4.4588𝑒−015	1.4731𝑒−014	0.6030	0.3027
	1.35	7.3145𝑒−015	5.0010𝑒−015	1.4777𝑒−014	0.6837	0.3384
𝐿 (𝑑=0.5 mm, 𝑊=0.75 mm)	0.5	3.8474𝑒−015	2.2331𝑒−015	7.8047𝑒−015	0.5804	0.2861
	1	6.8325𝑒−015	3.8273𝑒−015	1.3724𝑒−014	0.5602	0.2789
	1.5	8.8826𝑒−015	5.1518𝑒−015	1.7828𝑒−014	0.5800	0.2890
	2	1.0169𝑒−014	6.4411𝑒−015	2.0583𝑒−014	0.6334	0.3129