Cell Proliferation Tracking Using Graphene Sensor Arrays
Figure 3
Production and microfabrication of graphene. (a) CVD growth of graphene on copper foil in a tube furnace, (b) graphene is attached to SiO2/Si by attaching to a support layer of PMMA and thermal-release tape and transferring by a combination of heat and pressure, (c) after transfer to SiO2/Si substrate, a Ni protection layer is patterned on the graphene, (d) oxygen plasma removes the unprotected graphene and the Nickel is subsequently removed by HCl etching. (e) shows the contacted graphene strips and (f) shows integration of the sensor into a chip carrier.
