Predictions of the Compressible Fluid Model and its Comparison to Experimental Measurements of Factors and Flexural Resonance Frequencies for Microcantilevers
Figure 1
(a) SEM image of typical cantilever array used for these measurements. (b) Closer view of the hinged end of one of the 7 μm thick cantilever showing the 120 μm long hinged design that connects the cantilever with the main body of the array. (c), (d) Two closer views of the hinged portion of the 2 and 7 μm thick cantilevers, respectively. The hinge is approximately twice the thickness of the cantilever for the 7 μm thick cantilevers and approximately three times the thickness on the 2 μm thick cantilevers.
