Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

<table>Schematic representation of the geometry of the laser deflection setup. The bending of the cantilever represented by <svg height="10.8" id="M18" style="vertical-align:-0.11285pt" version="1.1" viewbox="0 0 20 10.8" width="20" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.8)">
<g transform="translate(72,-63.36)">
<text transform="matrix(1,0,0,-1,-71.95,63.52)">
<tspan style="font-size: 12.50px; " x="0" y="0">Δ</tspan>
<tspan style="font-size: 12.50px; " x="9.0271664" y="0">𝑥</tspan>
</text>
</g>
</g>
</svg> is measured by the PSD as <svg height="10.85" id="M19" style="vertical-align:-0.15048pt" version="1.1" viewbox="0 0 20.6625 10.85" width="20.6625" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,10.85)">
<g transform="translate(72,-63.32)">
<text transform="matrix(1,0,0,-1,-71.95,63.52)">
<tspan style="font-size: 12.50px; " x="0" y="0">Δ</tspan>
<tspan style="font-size: 12.50px; " x="9.0271664" y="0">𝑑</tspan>
</text>
</g>
</g>
</svg>. The active length of the PSD is <svg height="16.85" id="M20" style="vertical-align:-5.03984pt" version="1.1" viewbox="0 0 20.9125 16.85" width="20.9125" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,16.85)">
<g transform="translate(72,-58.52)">
<text transform="matrix(1,0,0,-1,-71.95,63.6)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝑙</tspan>
</text>
<text transform="matrix(1,0,0,-1,-67.97,60.47)">
<tspan style="font-size: 8.75px; " x="0" y="0">p</tspan>
<tspan style="font-size: 8.75px; " x="4.3759999" y="0">s</tspan>
<tspan style="font-size: 8.75px; " x="7.7805281" y="0">d</tspan>
</text>
</g>
</g>
</svg>.</table>

Journal of Sensors

fig1

Figure 1

Figure 1: Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups 