Journal of Sensors / 2012 / Article / Fig 1

Research Article

Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

Figure 1

Schematic representation of the geometry of the laser deflection setup. The bending of the cantilever represented by Δ 𝑥 is measured by the PSD as Δ 𝑑 . The active length of the PSD is 𝑙 p s d .