Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

<table class="table-group" id="tab2"><tr><td><table class="table"><tr><td class="thead-hr" colspan="5"><hr/></td></tr><tr><td align="left" rowspan="2">Spring constant</td><td align="center" colspan="2">Micromasch B cantilevers</td><td align="center" colspan="2">NTMDT cantilevers E</td></tr><tr><td align="center">B1</td><td align="center">B2</td><td align="center">E1</td><td align="center">E3</td></tr><tr><td align="center" colspan="5"><hr/></td></tr><tr><td align="left"><span style="width: 65.837502px;"><svg height="14.075" id="M43" style="vertical-align:-2.72116pt" version="1.1" viewbox="0 0 65.837502 14.075" width="65.837502" xmlns="http://www.w3.org/2000/svg">
<g transform="matrix(1.25,0,0,-1.25,0,14.075)">
<g transform="translate(72,-60.74)">
<text transform="matrix(1,0,0,-1,-71.95,63.5)">
<tspan style="font-size: 12.50px; " x="0" y="0">𝜅</tspan>
<tspan style="font-size: 12.50px; " x="9.5022802" y="0">(</tspan>
<tspan style="font-size: 12.50px; " x="13.665779" y="0">p</tspan>
<tspan style="font-size: 12.50px; " x="19.917278" y="0">N</tspan>
<tspan style="font-size: 12.50px; " x="28.944445" y="0">/</tspan>
<tspan style="font-size: 12.50px; " x="32.42028" y="0">n</tspan>
<tspan style="font-size: 12.50px; " x="38.67178" y="0">m</tspan>
<tspan style="font-size: 12.50px; " x="48.399113" y="0">)</tspan>
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</svg></span></td><td align="center">69.66</td><td align="center">166.74</td><td align="center">32.64</td><td align="center">53.13</td></tr><tr class="table-tr"><td colspan="5"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

Spring constants <svg height="7.0124998" id="M42" style="vertical-align:-0.0pt" version="1.1" viewbox="0 0 9.4125004 7.0124998" width="9.4125004" xmlns="http://www.w3.org/2000/svg">
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<tspan style="font-size: 12.50px; " x="0" y="0">𝜅</tspan>
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</svg> of the calibration cantilevers.

Journal of Sensors

tab2

Table 2

Table 2: Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups 