Journal of Sensors / 2012 / Article / Tab 3

Research Article

Rapid and Reliable Calibration of Laser Beam Deflection System for Microcantilever-Based Sensor Setups

Table 3

Calibration factors for the cantilever deflection Setups.

Area under curve ๐บ Average ๐บ

Deflection factor ๐บ setup 1
Cant B1 ( ๐œ… = 6 9 . 6 6 p N / n m ) Trial 1 5 . 2 0 ๐ธ โˆ’ 1 0 21282077.5
Trial 2 4 . 5 1 ๐ธ โˆ’ 1 0 2284
Trial 3 4 . 9 8 ๐ธ โˆ’ 1 0 2175
Cant B2 ( ๐œ… = 1 6 6 . 7 4 p N / n m ) Trial 1 2 . 4 9 ๐ธ โˆ’ 1 0 1986
Trial 2 2 . 5 0 ๐ธ โˆ’ 1 0 1982
Trial 3 2 . 7 0 ๐ธ โˆ’ 1 0 1910

Deflection factor ๐บ setup 2
Cant E1 ( ๐œ… = 3 2 . 6 4 p N / n m ) Trial 1 7 . 9 3 ๐ธ โˆ’ 1 0 25172679.5
Trial 2 5 . 3 6 ๐ธ โˆ’ 1 0 3062
Trial 3 6 . 0 1 ๐ธ โˆ’ 1 0 2891
Cant E3 ( ๐œ… = 5 3 . 1 3 p N / n m ) Trial 1 3 . 9 2 ๐ธ โˆ’ 1 0 2807
Trial 2 5 . 5 0 ๐ธ โˆ’ 1 0 2368
Trial 3 5 . 2 2 ๐ธ โˆ’ 1 0 2432