Integrated Channel Selector for Directing Fluid Flow Using Thermoreversible Gelation Controlled by a Digital Mirror Device

Figure 2

Fabrication of the channel selector system.

(a) Cr/Au depositing

(b) Resist patterning

(c) Ni plating

(d) Glass etching

(e) Resist patterning

(f) Cr/Pt spattering

(g) Liftoff

(h) Glass bonding