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Journal of Sensors
Volume 2014, Article ID 431503, 6 pages
http://dx.doi.org/10.1155/2014/431503
Research Article

A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

1Key Laboratory of Instrumentation Science & Dynamic Measurement, North University of China, Ministry of Education, Tai Yuan 030051, China
2Science and Technology on Electronic Test & Measurement Laboratory, North University of China, Tai Yuan 030051, China
3National Key Laboratory of Fundamental Science of Micro/Nano-Device and System Technology, Chongqing University, Chongqing 400044, China

Received 22 February 2014; Revised 8 June 2014; Accepted 8 June 2014; Published 23 June 2014

Academic Editor: Xinyong Dong

Copyright © 2014 Qiulin Tan et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology. The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor. The inductor and capacitor were fabricated by screen-printing. Pressure measurement is tested using a wireless mutual inductance coupling method. The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar. Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C. The max readout distance is 3 cm at room temperature. The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.