Research Article
Research on Nonlinear Dynamics of Drive Mode in Z-Axis Silicon Microgyroscope
Table 1
Structural parameters for drive mode of silicon gyroscope.
| Parameter | Value | Unit |
| Proof mass | 1.36 | mg | Linear natural frequency | 3320 | Hz | Quality factor | 2800 | — | Comb actuator | | | N | 900 | — | h | 60 | μm | | 10 | μm | e | 4 | μm | d | 4 | μm |
|
|