Frequency Tuning of Work Modes in <i>Z</i>-Axis Dual-Mass Silicon Microgyroscope

<table class="figure-group"><tr class="fig-image" id="a"><td><object data="https://static.hindawi.com/articles/js/volume-2014/891735/figures/891735.fig.0011a.svgz" name="891735.fig.0011a" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(a) </b>Tuning voltage</td></tr><tr class="fig-image" id="b"><td><object data="https://static.hindawi.com/articles/js/volume-2014/891735/figures/891735.fig.0011b.svgz" name="891735.fig.0011b" type="image/svg+xml"></object></td></tr><tr class="fig-caption"><td><b>(b) </b>Sense frequency</td></tr></table>

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Journal of Sensors

fig11

Figure 11

Figure 11: Frequency Tuning of Work Modes in <i>Z</i>-Axis Dual-Mass Silicon Microgyroscope 

Journal of Sensors

Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Figure 11