Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Figure 3

The dependence of work frequencies on the size of U-beams: (a) the length of drive U-beams, (b) the width of drive U-beams, (c) the length of sense U-beams, and (d) the width of sense U-beams.

(a)  

(b)

(c)

(d)