Research Article
Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope
Table 1
Parameters for FE simulation.
| Parameter | Value | Unit |
| Single-crystal silicon | Young’s modulus | 1.7 1011 | Pa | Poisson’s ratio | 0.28 | — | Density | 2330 | kg/m3 | Mesh element | Solid 95 | — |
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