Research Article
Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope
Table 2
Designed structure parameters for gyroscope.
| Parameter | Value | Unit |
| stiffness | | 302.2 | N/m | coupling stiffness | | 74.6 | N/m | stiffness | | 431.7 | N/m | coupling stiffness | | 20.9 | N/m | mass | | 0.68 | mg | mass | | 0.68 | mg | Tuning comb | | 19 | ā | | 60 | m | | 300 | m | | 4.5 | m |
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