Frequency Tuning of Work Modes in Z-Axis Dual-Mass Silicon Microgyroscope

Table 3

Simulation parameters for frequency control loop.

Parameters	Value
	1 10^−6 N/V
	1 10^10 V/m
	17 V
	0.001 V
	2   80 rad/s
	2   10 rad/s
	2   10 rad/s
	0.68 10^−6 kg
	100 deg/s
	100 deg/s
	157580