Research Article
A New MEMS Stochastic Model Order Reduction Method: Research and Application
Table 1
The parameters of single-ended fixed electrostatic actuating microbeam structure.
| (beam length) | 610 | (beam width) | 40 | (beam thickness) | 2.2 | (initial gap distance) | 2.3 | (material Young’s modulus) | 149 GPa | (material density) | 2330 kg/m3 | (air viscosity) | 1.82 × 10−5 kg/(m·s) | (mean-free path of air) | 0.064 |
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