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Journal of Sensors
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2015
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Article
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Tab 2
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Research Article
A New MEMS Stochastic Model Order Reduction Method: Research and Application
Table 2
The GPC response inputs parameters.
Variable
Distribution
Range
Units
1.6–3.6
μ
m
549–671
μ
m
27–33
μ
m
177–216
GPa
4.0–5.0
μ
m