Effect of the Tip Size on AFM Cantilever Based Force Sensor

<table class="table-group" id="tab1"><tr><td><table class="table"><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr class="thead"><td align="left" rowspan="2">Measured adhesion force</td><td align="center" colspan="3">Tip size (<i>μ</i>m)</td></tr><tr class="thead"><td align="center">1.0</td><td align="center">2.5</td><td align="center">4.0</td></tr><tr><td class="thead-hr" colspan="4"><hr/></td></tr><tr><td align="left">Average (<i>μ</i>N)</td><td align="center">24.8</td><td align="center">35.0</td><td align="center">65.6</td></tr><tr><td align="left">Deviation (<i>μ</i>N)</td><td align="center">6.4</td><td align="center">11.7</td><td align="center">13.1</td></tr><tr class="table-tr"><td colspan="4"><hr class="tbody-hr"/></td></tr></table></td></tr></table>

The measured adhesion force by the end effectors with different tip sizes.

Journal of Sensors

tab1

Table 1

Table 1: Effect of the Tip Size on AFM Cantilever Based Force Sensor 