Fabrication of Porous Silicon Based Humidity Sensing Elements on Paper

Figure 7

Optical micrographs of sensing element with (a) the lowest (0.3 mg) and (b) the highest (1 mg) amount of spray-coated pSi on the interdigitated inkjet-printed silver electrodes. Also shown are AFM topographical images (50 μm × 50 μm) of the border of paper and (c) thin and (d) thick layer of pSi. The black squares indicate the capture spots of the AFM topographs.

(a)  

(b)

(c)

(d)