Table of Contents Author Guidelines Submit a Manuscript
Journal of Sensors
Volume 2016, Article ID 1353212, 8 pages
Research Article

Detailed Analysis of the Timing Measurements in Optical Position Sensing Devices Based on Laser Beam Deflection

Carinthian Tech Research AG, Europastrasse 12, 9524 Villach, Austria

Received 30 August 2015; Accepted 23 November 2015

Academic Editor: Marco Consales

Copyright © 2016 Andreas Tortschanoff. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.


I present a detailed analysis of the timing signals observed, when measuring the oscillation of a Lissajous scanner by sending a reflected laser beam onto carefully placed trigger diodes. This technique was used in a device which we have developed recently for the measurement of resonant MEMS scanner mirrors. For 2D scanner mirrors, cross talk between the two axes is observed. This cross talk can be well understood theoretically. In this paper, a quantitative analytical description is presented, which is confirmed by experimental results.