Detailed Analysis of the Timing Measurements in Optical Position Sensing Devices Based on Laser Beam Deflection

Table 1

Parameters used for simulations.

Mechanical amplitude	α = β = 20°
Frequency ratio	:  = 6 : 1
Detector position	= = 10°
Relative phase	φ = 0°
Frequencies	= 600 Hz
	= 100 Hz