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Journal of Sensors
Volume 2016 (2016), Article ID 3816094, 31 pages
http://dx.doi.org/10.1155/2016/3816094
Review Article

In2O3- and SnO2-Based Thin Film Ozone Sensors: Fundamentals

1Gwangju Institute of Science and Technology, Gwangju 500-712, Republic of Korea
2State University of Moldova, 2009 Chisinau, Moldova

Received 22 December 2015; Accepted 11 February 2016

Academic Editor: Eduard Llobet

Copyright © 2016 G. Korotcenkov et al. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.

Abstract

The paper considers SnO2 and In2O3 thin films as materials for the design of solid-state conductometric ozone sensors in depth. In particular, the present review covers the analysis of the fundamentals of SnO2- and In2O3-based conductometric ozone sensor operation. The main focus is on the description of mechanisms of ozone interaction with metal oxides, the influence of air humidity on sensor response, and processes that control the kinetics of sensor response to ozone.