In₂O₃- and SnO₂-Based Thin Film Ozone Sensors: Fundamentals

Figure 11

Diagram illustrating processes taking place at the SnO₂ surface during ozone detection: (1) film resistance in air; (2) film resistance in atmosphere containing ozone; (3)–(5) surface concentrations of molecular water, molecular oxygen, and OH-groups, correspondingly; (6) initial surface concentration of chemisorbed oxygen (O⁻) determined by oxygen dissociative adsorption; (7) possible addition of chemisorbed oxygen due to dissociative adsorption of ozone. ) measurements were carried out for SnO₂ films deposited at = 320°C. Adapted with permission from [116]. Copyright 2004 Elsevier.